Anisotropic thermal conductivity of nanocolumnar W thin films

We report on thermal conductivity of W films 350 nm thick sputter-deposited by glancing angle deposition (GLAD). The 3? method is used to measure the in-plane kx and ky for deposited with a ? 0° 80°. For classical (?=0°), 71 m?1 K?1, whereas GLAD (?=80°) conduction drops kx=3.2 K?1 ky=4.8 K?1. anisotropy corresponds heat favored in direction perpendicular axis, which related anisotropic columnar microstructure. Electrical also determined leading significant deviation from Wiedemann-Franz law films.